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The document describes the key steps in CMOS fabrication: 1. A p-type substrate is used, and n-well regions are defined through implantation to create isolation for p-MOSFETs. 2. Active device regions and field oxide isolation are then patterned, followed by gate oxide growth and polysilicon deposition. 3. Self-aligned implantation creates n-type and p-type source/drain regions. Additional metallization layers connect the transistors.

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CMOS Fabrication 1.Introduction-Trends 2.Fabrication Process -Basic steps 3.NMOS Fabrication 4.N-well Process 5.P-well Process 6.Twin-tub Process 7.Latch Up Problem
Introduction- Trends  1.Device Scale Down- 4 Generations of IC technology 1. Micron – 1um/2um year 1983-1986 (Intel 80286) 2. Submicron - < .8um year 1989-1995 (Intel 80386) 3. Deep Submicron - <.3um year 1995-2002 ( Pentium) 4. Ultra Deep Submicron - < .1um(100nm) year 2002-2007 (Pentium IV)
Evolution in the Technology Lithogr -aphy year Metal Layers Core Supply IO pads 1.2um 1986 2 5.0 250 0.7um 1988 2 5.0 350 0.5um 1992 3 3.3 600 0.18um 1998 6 1.8 1500 90nm 2003 6-10 1.0 2000 65nm 2005 6-12 0.8 3000
Improvements of Increased Density  Reduction in Si area reduces the parasitic capacitance of junctions and interconnects thus increasing the switching speed  The shorter dimension of device itself speeds up switching thus further increasing clock frequency
2.Increasing of speed in digital circuits  GaAs may ultimately supplant Si for high frequency requirements 3. Increasing Complexity of Circuits 4. Ever-growing dependence on EDA/CAD tools
A typical IC design cycle involves several steps:  Feasibility study and die size estimate  Functional verification  Circuit design  Circuit simulation  Floorplanning  Design review  Layout  Layout verification  Layout review  Design For Test and Automatic test pattern generation  Design for manufacturability (IC)  Tapeout - Mask data preparation  Wafer fabrication  Die test  Packaging  Device characterization  Datasheet generation
Fabrication Process-Basic steps  Fabrication process, circuit design process and performance of the resulting chip strongly depend on each other  Circuit designer should have a clear understanding of various masks
 Masks – Each processing step requires certain areas to be defined on the chip by masks  Lithography – The process used to transfer a pattern to a layer on the chip  Wells – To accommodate both nmos & pmos devices, special regions called wells or tubs are created
Characteristics of CMOS family  High Noise immunity  Low static Power  High Packaging density
N-well Process
CMOS fabrication sequence 0. Start:  For an n-well process the starting point is a p-type silicon wafer:  wafer: typically 75 to 230mm in diameter and less than 1mm thick 1. Epitaxial growth:  A single p-type single crystal film is grown on the surface of the wafer by: subjecting the wafer to high temperature and a source of dopant material  The epi layer is used as the base layer to build the devices P+ -type wafer p-epitaxial layer Diameter = 75 to 230mm < 1mm
CMOS fabrication sequence 2. N-well Formation:  PMOS transistors are fabricated in n-well regions  The first mask defines the n-well regions  N-well’s are formed by ion implantation or deposition and diffusion  Ion implantation results in shallower wells compatible with today’s fine-line processes p-type epitaxial layer n-well Lateral diffusion Physical structure cross section Mask (top view) n-well mask
CMOS fabrication sequence 3. Active area definition:  Active area: planar section of the surface where transistors are build defines the gate region (thin oxide) defines the n+ or p+ regions  A thin layer of SiO2 is grown over the active region and covered with silicon nitride n-well Silicon NitrideStress-relief oxide p-type Active mask
CMOS fabrication sequence 4. Isolation:  Parasitic (unwanted) FET’s exist between unrelated transistors (Field Oxide FET’s)  Source and drains are existing source and drains of wanted devices  Gates are metal and polysilicon interconnects  The threshold voltage of FOX FET’s are higher than for normal FET’s p-substrate (bulk) n+ n+ Parasitic FOX device n+ n+
CMOS fabrication sequence  FOX FET’s threshold is made high by:  introducing a channel-stop diffusion that raises the impurity concentration in the substrate in areas where transistors are not required  making the FOX thick 4.1 Channel-stop implant  The silicon nitride (over n-active) and the photoresist (over n-well) act as masks for the channel-stop implant n-well p-type channel stop mask = ~(n-well mask) resit Implant (Boron) p+ channel-stop implant
CMOS fabrication sequence 4.2 Local oxidation of silicon (LOCOS)  The photoresist mask is removed  The SiO2/SiN layers will now act as a masks  The thick field oxide is then grown by:  exposing the surface of the wafer to a flow of oxygen-rich gas  The oxide grows in both the vertical and lateral directions  This results in a active area smaller than patterned n-well p-type Field oxide (FOX) patterned active area active area after LOCOS
CMOS fabrication sequence 5. Gate oxide growth  The nitride and stress-relief oxide are removed  The devices threshold voltage is adjusted by:  adding charge at the silicon/oxide interface  The well controlled gate oxide is grown with thickness tox n-well p-type n-well p-type tox tox Gate oxide
CMOS fabrication sequence 6. Polysilicon deposition and patterning  A layer of polysilicon is deposited over the entire wafer surface  The polysilicon is then patterned by a lithography sequence  All the MOSFET gates are defined in a single step  The polysilicon gate can be doped (n+) while is being deposited to lower its parasitic resistance (important in high speed fine line processes) n-well p-type Polysilicon gate Polysilicon mask
7. PMOS formation  Photoresist is patterned to cover all but the p+ regions  A boron ion beam creates the p+ source and drain regions  The polysilicon serves as a mask to the underlying channel This is called a self-aligned process It allows precise placement of the source and drain regions  During this process the gate gets doped with p-type impurities Since the gate had been doped n-type during deposition, the final type (n or p) will depend on which dopant is dominant n-well p-type p+ implant (boron) p+ mask Photoresist
CMOS fabrication sequence 8. NMOS formation  Photoresist is patterned to define the n+ regions  Donors (arsenic or phosphorous) are ion-implanted to dope the n+ source and drain regions  The process is self-aligned  The gate is n-type doped n-well p-type n+ implant (arsenic or phosphorous) n+ mask Photoresist
CMOS fabrication sequence 9. Annealing  After the implants are completed a thermal annealing cycle is executed  This allows the impurities to diffuse further into the bulk  After thermal annealing, it is important to keep the remaining process steps at as low temperature as possible n-well p-type n+ p+
CMOS fabrication sequence 10. Contact cuts  The surface of the IC is covered by a layer of CVD oxide The oxide is deposited at low temperature (LTO) to avoid that underlying doped regions will undergo diffusive spreading  Contact cuts are defined by etching SiO2 down to the surface to be contacted  These allow metal to contact diffusion and/or polysilicon regions n-well p-type n+ p+ Contact mask
CMOS fabrication sequence 11. Metal 1  A first level of metallization is applied to the wafer surface and selectively etched to produce the interconnects n-well p-type n+ p+ metal 1 mask metal 1
CMOS fabrication sequence 12. Metal 2  Another layer of LTO CVD oxide is added  Via openings are created  Metal 2 is deposited and patterned n-well p-type n+ p+ Via metal 1 metal 2
CMOS fabrication sequence 13. Over glass and pad openings  A protective layer is added over the surface:  The protective layer consists of: A layer of SiO2 Followed by a layer of silicon nitride  The SiN layer acts as a diffusion barrier against contaminants (passivation)  Finally, contact cuts are etched, over metal 2, on the passivation to allow for wire bonding.
Other processes  P-well process  NMOS devices are build on a implanted p-well  PMOS devices are build on the substrate  P-well process moderates the difference between the p- and the n-transistors since the P devices reside in the native substrate  Advantages: better balance between p- and n- transistors p-well n-typen+ p+
Other processes  Twin-well process  n+ or p+ substrate plus a lightly doped epi-layer (latchup prevention)  wells for the n- and p-transistors  Advantages, simultaneous optimization of p- and n- transistors:  threshold voltages  body effect  gain p-well n+ substrate n+ p+ n-well epitaxial layer